Products Details
The resist coating machine is a small-to-medium coating system developed and customized by our company for customers, featuring a high-precision modular design. It is equipped with an unwinding unit, comma coating unit, slot-die coating unit, UV curing unit, lamination & pulling unit, developing & cleaning unit, etching & cleaning unit, and winding unit. After unwinding and edge correction, the material enters the coating unit, where comma blade coating and slot-die coating can be switched at will. It is then cured by the UV curing unit, followed by developing cleaning and etching cleaning, and finally wound up after pulling and edge correction. It is suitable for pilot process parameters and small-batch production.
Coating Process
Comma Blade Coating
High-precision control: The comma blade is a precision metering roller that precisely controls coating thickness through the gap between the blade and the backup roll, making it ideal for high-viscosity fluids.
Thick coating capability: Compared with an ordinary blade, the comma blade is better suited for thicker coating applications.
Excellent flatness: Thanks to the rigid structure and rotary motion of the blade, it effectively eliminates unevenness on the substrate surface, ensuring a uniform coating.
Slot-Die Coating
High-precision film thickness control: The slot-die head uses extrusion-type metered feeding, which stably and precisely controls dry and wet coating thickness with excellent film thickness consistency. It adapts to coatings from ultra-thin to medium-thick, and to low-, medium-, and high-viscosity slurries.
High-speed continuous coating: Suitable for continuous high-speed roll-to-roll production with high efficiency, it fits large-scale industrial mass production and offers a wide coating speed window.
Excellent coating uniformity: Film thickness fluctuation is small in both the transverse and machine directions, with none of the streaks or scratches common to blade coating, delivering a high finished-product yield.
High slurry utilization: Closed-chamber feeding reduces slurry loss and limits volatilization and contamination, making it suitable for solvent-containing, easily oxidized, and high-value functional slurries.
Wide substrate adaptability: It can coat on various flexible substrates such as film, copper foil, aluminum foil, and non-woven fabric, with stronger tolerance for substrate surface flatness.
Core Parameters
|
Power Supply |
Three-phase AC 380 V ±10%, 50 Hz, 22 kW |
|
Air Supply |
0.5-0.8 MPa compressed air |
|
Coating Method |
Comma Blade + Slot-Die Coating |
|
Guide Roller Width |
500 mm |
|
Coating Width |
0-400 mm |
|
Mechanical Speed |
7 m/min |
|
Coating Speed |
Max. 5 m/min |
|
Coating Precision |
0.005 mm |
|
Curing Temperature |
0-100°C |
|
Weight |
Approx. 2500 kg (subject to actual weight) |
|
Machine Dimensions |
L 6000 mm × W 1050 mm × H 1850 mm (subject to actual dimensions) |
Products Features
Dual coating mode switching: This resist coating machine innovatively integrates a comma blade unit and a slot-die coating unit, which can be switched at will according to process requirements, greatly improving the versatility of the equipment.
Full-process photolithography integration: The resist coating machine covers not only coating, but also UV curing, developing cleaning, and etching cleaning units, realizing single-line automation from resist coating to pattern processing.
Micron-level precision control: This resist coating machine adopts a high-precision modular design, with coating precision stably controlled at 0.005 mm, ensuring the uniformity and consistency of the resist layer.
Efficient UV curing system: This resist coating machine has a built-in UV curing unit with a temperature control range of 0-100°C, which quickly completes the exposure and curing reaction of the resist.
Compact pilot-scale design: The resist coating machine has an overall length of only 6000 mm, weighs about 2500 kg, and occupies a small footprint, making it ideal for small-batch trial production in laboratories or R&D centers.
Flexible width adaptation: This resist coating machine offers a 500 mm guide roller width and an effective coating width of 0-400 mm, flexibly meeting the R&D needs of substrates in different sizes.
Applications & Industries
Flat panel display (FPD) industry, PCB/FPC circuit board industry, semiconductor manufacturing industry, micro-electromechanical systems (MEMS), optical components industry, and research institutes and universities.
Customization Services
As a leader in custom coating machines, we support customization of every component, including the unwinding unit, coating head unit, curing unit, winding unit, transmission and frame unit, and electrical control and inspection unit.
FAQ
Q: What is special about the coating methods of this resist coating machine?
A: It is equipped with both a comma blade unit and a slot-die coating unit, which can be switched at will according to process requirements.
Q: What is the maximum effective coating width of the machine?
A: The guide roller width is 500 mm, and the effective coating width is 0-400 mm.
Q: Which curing method is used, and what is the temperature range?
A: It uses a UV curing unit, with a temperature control range of 0-100°C.
Q: Besides coating and curing, what post-processing functions does the machine include?
A: It also integrates developing cleaning and etching cleaning units, so pattern processing can be completed directly.
Q: What is the mechanical running speed of the machine?
A: The mechanical speed is 7 m/min, and the maximum coating speed is 5 m/min.
Product Detail Images
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